Title page for ETD etd-12032002-115559
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Type of Document Master's Thesis
Author Volkar, Matthew J
Author's Email Address m.volkar@ieee.org
URN etd-12032002-115559
Title Tuning and Control of an On-Chip Piezoelectric Resonator
Degree Master of Science in Electrical Engineering
Program Electrical Engineering
School School of Engineering
Advisory Committee
Advisor Name Title
James T. Cain Committee Co-Chair
Marlin H. Mickle Committee Co-Chair
Ronald G. Hoelzeman Committee Member
William W. Clark Committee Member
Keywords
  • crystal oscillator
  • cmos capacitor
  • piezoelectric effect
  • oscillator
Date of Defense 2002-12-09
Availability unrestricted
Abstract
From clock signals for digital circuits to frequency references and voltage controlled oscillators for communication systems, oscillators are a fundamental element in many electronic circuits. With the current trend toward smaller and more tightly integrated systems, many applications would benefit greatly from the ability to integrate an oscillator onto a chip.

In this thesis, we describe the design and development of a new oscillator technology which makes use of a piezoelectric resonator for frequency control. By using a specially constructed piezoelectric structure, the proposed design exhibits several significant advantages over other currently available technologies including the ability to be manufactured on a silicon substrate. This document presents the design of the tuning and control circuitry for such a resonator as well as experimental results with a macro-scale prototype. Details of a truly single-chip oscillator solution, including the design of on-chip capacitors, switches and an amplifier, are also presented. Tuning of the prototype resonator structure is accomplished electrically and the design has shown frequency tuning of up to 1.5% of the nominal value with a theoretical limit of 40% given the appropriate resonator design.

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